JPH0478389U - - Google Patents
Info
- Publication number
- JPH0478389U JPH0478389U JP12267690U JP12267690U JPH0478389U JP H0478389 U JPH0478389 U JP H0478389U JP 12267690 U JP12267690 U JP 12267690U JP 12267690 U JP12267690 U JP 12267690U JP H0478389 U JPH0478389 U JP H0478389U
- Authority
- JP
- Japan
- Prior art keywords
- bypass passage
- control valve
- mass flow
- flow controller
- piping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 2
- 239000012530 fluid Substances 0.000 claims 1
Landscapes
- Flow Control (AREA)
- Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
- Examining Or Testing Airtightness (AREA)
- Pipe Accessories (AREA)
- Pipeline Systems (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12267690U JPH0639790Y2 (ja) | 1990-11-22 | 1990-11-22 | マスフローコントローラ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12267690U JPH0639790Y2 (ja) | 1990-11-22 | 1990-11-22 | マスフローコントローラ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0478389U true JPH0478389U (en]) | 1992-07-08 |
| JPH0639790Y2 JPH0639790Y2 (ja) | 1994-10-19 |
Family
ID=31870437
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12267690U Expired - Lifetime JPH0639790Y2 (ja) | 1990-11-22 | 1990-11-22 | マスフローコントローラ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0639790Y2 (en]) |
-
1990
- 1990-11-22 JP JP12267690U patent/JPH0639790Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0639790Y2 (ja) | 1994-10-19 |